Noise Effect Reduction on a MEMS Based AC Voltage Reference
نویسندگان
چکیده
منابع مشابه
IMEKO TC4 Symposium DESIGN AND FABRICATION OF MEMS BASED AC VOLTAGE REFERENCE
Abstrac t – This work explores the MEMS potentialities to fabricate flexible AC voltage references through mechanical-electrical transduction that could be used for high precision electrical metrology or for applications in miniaturized instrumentation. The design presented allows the generation of AC voltage reference ranging from 1V to 60 V using the same Epitaxial Silicon On Insulator (SOI) ...
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ژورنال
عنوان ژورنال: Journal of Applied Research and Technology
سال: 2011
ISSN: 2448-6736,1665-6423
DOI: 10.22201/icat.16656423.2011.9.01.446